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그 내용이 가지는 의미와 장비에서 지원하는 데이터가 어떤 인터페이스로 관리되는지를 정의한다
This test may also be applied to semiconductor materials other than silicon and to insulators other than silicon dioxide
This Test Method can be used to monitor or qualify photovoltaic (PV) silicon feedstock to be used in either crystalline or multicrystalline silicon wafer production
SEMI PV22 —Specification for Silicon Wafers for Use as Photovoltaic Solar Cells
white light confocal microscopy
P04400 - SEMI P44 - Specification for Open Artwork System Interchange Standard (OASIS ®) Specific to Mask Tools StdPbc-0526 그 내용이 가지는 의미와 장비에서This Standard defines the common mask data format specifications based on OASIS for mask tools, namely OASIS. MASK. OASIS. MASK specification applies to the input data format for mask tools. Referenced SEMI Standards (purchase separately) SEMI P39 Specification for OASIS Open Artwork System Interchange Standard Revision History SEMI P44 1216 (Reapproved 0124) SEMI P44 1216 (technical revision) SEMI P44 0316 (technical revision) SEMI P44 0211