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filters and passive components such as pressure gauges/transducers and flow meters
This Guide also addresses measurements related to energy
or installing manufacturing equipment or otherwise providing equipment support
메시지내의 데이터 표현 방식
1 The purpose of this Specification is to provide a generally applicable object model of semiconductor equipment structure and related elements
E05417 - SEMI E54.17 - A-LINKに関するセンサ／アクチュエータネットワークの規定 Lang-Japanese filters and passive components suchglobal Information & Control Technical Committee2011912global Audits and Reviews Subcommittee201112www. semiviews. org www. semi. org2005720067 SEMI E54 SANSEMI E54A LINK SEMI E54 Referenced SEMI Standards SEMI E39 Object Services Standard: Concepts, Behavior, and Services SEMI E54. 1 Standard for Sensor Actuator Network Common Device Model SEMI E54. 3 Specification for Sensor Actuator Network Specific Device Model for Mass Flow Device SEMI E54. 10