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9% Hydrofluoric Acid (10:1 v/v)
The purpose of the process equipment adapter plate guide is to provide guidance on the expectations and application for process equipment adapter plates
4 In principle
This Specification defines the interface plane between modules in a cluster tool
SEMI E162 — Mechanical Interface Specification for 450 mm Front-Opening Shipping Box Load Port
P02900 - SEMI P29 - 減衰型位相シフトマスク（ハーフトーン型位相シフトマスク）およびマスクブランクスに特有な特性の仕様 StdTpc-Fire Safety 9% Hydrofluoric Acid (10:1 v/v)global Micropatterning Committee200598global Audits and Reviews Subcommittee200510www. semi. org200511CD ROM19979 2005 Referenced SEMI Standards SEMI P1 Specification for Hard Surface Photomask Substrates SEMI P22 Guideline for Photomask Defect Classification and Size Definition
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