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SEMI E62-0301 (technical revision)
This Document is to provide a standard of mono-dispersed gold nanoparticle (GNP) challenge test for liquid filter rated below 30 nm using inductively coupled plasma-mass spectroscopy (ICP-MS)
This Document does not include the definition of the treatment of Multiple Stage
This Test Method is based on the following scenarios
it does not define the communication protocol for actuation or the equipment or host models that will support and enable this actuation capability
F00500 - SEMI F5 - Guide for Gaseous Effluent Handling StdVol-Traceability SEMI E62-0301 (technical revision)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. NOTICE: This document, as balloted, is intended to replace SEMI F5 90 in its entirety. NOTICE: Paragraphs entitled "NOTE" are not an official part of this guide and are not intended to modify or supersede the official
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