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SEMI E43 — Recommended Practice for Electrostatic Measurements on Objects and Surfaces
The purpose of this Document is to provide a specification for boron trifluoride (BF3) used in the semiconductor industry
This can be shared among users and suppliers of semiconductor manufacturing equipment
transport and storage system controller architecture
SEMI M71-0120 (Reapproved 0425)
G09400 - SEMI G94 - Specification for Coin-Stack Type Tape Frame Shipping Container for 300 mm Wafer Revision:SEMI G94-0113 - Superseded SEMI E43 — Recommended PracticeThis Specification defines the dimensions of container and requirements for securing the interface between container and processing equipment or wafer transportation equipment. This Standard specifies the requirements for wafer spacers used for separation of wafers and for a cushion material used for wafer protection. This Standard specifies the electrical characteristics and requirements for hazardous substance for the material of container. The