E02400 - SEMI E24 - Cluster Tool Module Interface: Isolation Valve Interlocks Standard StdVol-Gases E This standard was editorially

E This standard was editorially modified in February 2005 to correct errors in Figure R2-1

SEMI MF1392-0307 (Reapproved 0718)

1  The specification for epitaxial silicon wafers for discrete semiconductor device manufacture is specifically directed to silicon homoepitaxial deposits thicker than 25 µm on homogeneous silicon substrates or similar epitaxial wafers that are to be used to make discrete devices

This Document provides test methods for qualifying the mechanical integrity of gas delivery systems through vibration and shock testing

These dimensions apply to substrates that are principally used in fabricating AMLCD displays

E02400 - SEMI E24 - Cluster Tool Module Interface: Isolation Valve Interlocks Standard StdVol-Gases E This standard was editoriallyThis standard was technically approved by the global Physical Interfaces & Carriers Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on April 30, 2010. Initially available at www. semi. org in June 2010. Originally published in 1992; previously published July 2004. NOTICE: This document was balloted and approved for withdrawal in 2010. The purpose of this standard is to prevent any opening or closing of