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Control of parameters such as bonded wafer stack (BWS) thickness
The measurement methods for chromatic characteristics comply with SEMI D22
visual) evaluation of corrosion resistance
and size of the photomask defects
SEMI D22に準じる。
E13000 - SEMI E130 - 300mm環境のプローバ専用装置モデル（PSEM300）に関する仕様 Revision:SEMI E130-1104 - Superseded Control of parameters such as300 mmPSEM300PSEM300 Subordinate Standards (included): SEMI E130. 1 1104 (Reapproved 0710) 300 mmPSEM300SECS II Referenced SEMI Standards (purchase separately) SEMI E5 SEMI Equipment Communication Standard 2 Message Content (SECS II) SEMI E30 Generic Model for Communications and Control of Manufacturing Equipment (GEM) SEMI E37 High Speed SECS Message Services (HSMS) Generic Services SEMI E40 Standard for Processing Management SEMI E42 Recipe
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