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it is very necessary to establish the standard for PSS products
This Document is intended to define the reference planes for the dimensions of the carriers and the load port features that will interact with the carriers
SEMI S14-1016 (technical revision)
This Document defines a communication specification based on the A-LINK protocol to enable communications between intelligent devices on a sensor/actuator network (SAN) that operate according to SEMI E54 device models on semiconductor manufacturing equipment
orgで，そして2009年3月にCD-ROMで入手可能となる。初版は1999年9月に発行，前版は2005年3月に発行された。
G05900 - SEMI G59 - リードフレーム挿間紙上のイオン汚染物および挿間紙からリードフレームに移る汚染物の測定方法 Revision:SEMI G59-94 (Reapproved 0811) - Superseded it is very necessary toglobal Assembly & Packaging Technical Committee201171global Audits and Reviews Subcommittee20118www. semiviews. org www. semi. org199420023 : Referenced SEMI Standards None.
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