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This Document is intended for TSVs in silicon
3 The messages defined in the Standard support the most typical activities required for IC manufacturing
SEMI P37 — Specification for Extreme Ultraviolet Lithography Mask Substrates
the diameter of 300 mm silicon wafers fabricated specifically for use as carrier wafers may be greater than 300 mm
high- and low-impedance load
E14500 - SEMI E145 - Classification for Measurement Unit Symbols in XML StdPbc-0724 This Document is intended forThe inclusion of extensible markup language (XML) notation within current SEMI Standards reflects the industrys growing interest in XML technology. This Standard defines the measurement units symbol representations in XML for the semiconductor industry based on units defined in SEMI E5, SEMI E6, and the International System of Units (SI). Its purpose is to provide a standardized set of symbols that represent common units for the semiconductor industry