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SEMI E133-0212 (technical revision)
The interpretation of spreading resistance measurements depends in turn on the reproducibility of test specimen measurements and on the reproducibility of calibration specimen measurements
本方法可便于在世界各地实验室之间统一测试方案和测试结果，用于监测或测量硅粉中B
SEMI E5-88 (technical revision)
It provides three classes of smaller diameter test wafers (through 125 mm)
E04700 - SEMI E47 - Specification for 150 mm/200 mm Pod Handles Revision:SEMI E47-0301 - Superseded SEMI E133-0212 (technical revision)NOTICE: This Standard or Safety Guideline has Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 This Specification provides a unified form and location for pod handles to enable automatic pod handling. 2 Scope 2. 1 This Specification defines the dimensions and location of handles on 150 mm 200 mm pod.