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SEMI F63-1224 (technical revision)
PID test of solar cells
This Guide defines standardized positions for measuring diameter of circular wafers of silicon and other semiconducting materials especially those processed with edge-follower edge-rounding equipment that contain flats or notches (fiducials) on the periphery
3-0710 (Reapproved 0322)
as well as economic and environmental considerations
E04000 - SEMI E40 - 프로세싱 관리 표준 Revision:SEMI E40-0312 - Superseded SEMI F63-1224 (technical revision)Global Information & Control Technical Committee , 2011 12 24 Global Audits and Reviews Subcommittee . 1995 , 2011 11 . www. semiviews. org www. semi. org 2012 3 . (command) , . , (material processing) , (task) (messaging serives) . , . (misprocessing) , . . (processing jobs) , . (control) , (multi resource) . (jobs) . ( ), . (tuning) (feedforward) (feedback) , (Method) (recipe variable parameters) , (closed loop control) . (handling) (tuning) . ,
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