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Dimethyldimethoxysilane
and delivery conditions should be taken into account when planning the testing
This Standard was technically approved by the global Gases Technical Committee
This Document covers requirements for phosphine used in the semiconductor industry
Additional layers on the surface of the silicon wafer
C02900 - SEMI C29 - Specification and Guide for 4.9% Hydrofluoric Acid (10:1 v/v) Revision:SEMI C29-0618 - Inactive DimethyldimethoxysilaneNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 The purpose of this Standard is to standardize requirements for 4. 9% hydrofluoric acid used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to
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