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1 This Standard is written to provide better communication between parties in the supply chain
the reality is that each fab controls its equipment with its own specification
Selected terms and definitions and summary specifications are included
Although these features are intended for specific functions of AGV
and broken beads content
C00322 - SEMI C3.22 - Standard for Oxygen (O2), 99.5% Quality StdPbc-1224 1 This Standard is writtenThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on July 11, 2004. Available at www. semi. org in November 2004; originally published in 1983; previously published in 1993. NOTICE: This Document was balloted and approved for withdrawal in 2004. Oxygen is a colorless, odorless and oxidizing gas. It supports combustion. Referenced SEMI
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