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SEMI P37 — Specification for Extreme Ultraviolet Lithography Mask Substrates
レチクルの損傷については，危険性はレチクル上の静電気の変化またはレチクルの周囲の電界強度によって定義される。
SEMI MF1390-0218 (Reapproved 1023)
Recommendations for EPOC location
INAA is an NAA where the analysis is conducted directly on the irradiated samples
E07300 - SEMI E73 - Specification for Vacuum Pump Interfaces - Dry Pumps StdDcs-Replaced SEMI P37 — Specification forNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Standard specifies the physical and electrical interfaces for dry pump (DRP) type vacuum pumps. Standardization of pump interfaces will allow for interchangeability of pumps. Device manufacturers use this standard when