M05600 - SEMI M56 - Practice for Determining Cost Components for Metrology Equipment Due to Measurement Variability and Bias StdPbc-1116 If present

If present

Each technology has unique strengths and weaknesses—some rely on front-surface illumination

1  The purpose of this Standard is to standardize requirements for ammonium hydroxide used in the semiconductor industry and testing procedures to support those standards

at the concentration levels of interest

The purpose of this Standard is to provide specification for ammonia (NH3) that is used in the semiconductor industry

M05600 - SEMI M56 - Practice for Determining Cost Components for Metrology Equipment Due to Measurement Variability and Bias StdPbc-1116 If presentThis Practice covers a methodology to determine the costs associated with misclassification of product due to variability and bias of measurement equipment. These costs are associated with failing product that conforms with specifications and passing product that does not conform with specifications. This Practice can be applied to make relative cost comparisons between two or more measurement gauges operating under conditions specified by the user.