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as well as internal buffer equipment carrier transfers
2-0823 (technical revision)
The purpose of this Document is to define the basic interface dimensions of a load port on the semiconductor manufacturing equipment (SME)
The term ‘perceptual’ is subject to CIE 248 (CIECAM16
the position of the substrate
C00604 - SEMI C6.4 - パイプラインガスとして授受されるグレード20/0.02窒素（N2）およびアルゴン（Ar）に対するパーティクル仕様 StdPbc-0703 as well as internal bufferNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Gases Global Technical Committee2011912global Audits and Reviews Subcommittee201111www. semiviews. org www. semi. org1990200211 NOTICE: This Document is no longer supported by the global technical committee. It has been replaced by
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