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government regulations
SEMI C56-0224 (technical revision)
org September 2002
providing particle control as risk mitigation for particle contamination on the wafer
本スタンダードは，
C03400 - SEMI C34 - Specification and Guide for Mixed Acid Etchants Revision:SEMI C34-0113 (Reapproved 0219) - Inactive government regulationsNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 The purpose of this Standard is to standardize requirements for mixed acid etchants used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give
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