F09500 - SEMI F95 - Specification for Dimension of Three Port Components for 1.5 Inch Four Fastener Configuration Type Surface Mount Gas Distribution Systems StdTpc-FPD Polarizing Films corresponding to particular means of

corresponding to particular means of transportation are chosen by the user according to existing standards (e

ロボティックハンドリングフランジ（オプション）　（4）

エッジグリップハンドリングデバイスを使用したウェーハへのランダムアクセスは，本スタンダードの要求事項ではない。

1-0309 (technical revision)

polished or unpolished

F09500 - SEMI F95 - Specification for Dimension of Three Port Components for 1.5 Inch Four Fastener Configuration Type Surface Mount Gas Distribution Systems StdTpc-FPD Polarizing Films corresponding to particular means ofThis Standard was technically approved by the global Gases Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 30, 2012. Available at www. semiviews. org and www. semi. org in October 2012; originally published March 2004; previously published March 2012. This Standard establishes the properties and physical of two port components for 1. 5 inch type surface mount gas distribution